Abstract:
The stationary parameters and composition of DC glow discharge plasma (p=40–200 Pa, i=30–70 mA) in CH4–Ar mixtures of different compositions have been studied by probe diagnostics and mathematical simulation. Data on the influence of the initial composition of the plasma-forming mixture on the reduced electric field strength, energy electron distribution, rate constants of processes under electron impact, stationary concentrations, and flux densities of neutral and charged particles have been obtained.
Citation:
A. M. Efremov, O. A. Semenova, S. M. Barinov, “Influence of the initial composition of a methane–argon mixture on electrophysical parameters and plasma composition of DC glow discharge”, TVT, 53:2 (2015), 174–182; High Temperature, 53:2 (2015), 171–178