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Teplofizika vysokikh temperatur
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Teplofizika vysokikh temperatur, 2015, Volume 53, Issue 2, Pages 169–173
DOI: https://doi.org/10.7868/S0040364415020155 (Mi tvt206) 		 
This article is cited in 4 scientific papers (total in 4 papers)

Plasma Investigations

Heating of gas and polimeric material in low-temperature plasma of a high-frequency discharge

A. V. Markov, Yu. P. Yulenets

State Technological Institute of St. Petersburg (Technical University)
Full-text PDF (154 kB) Citations (4)
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DOI: https://doi.org/10.7868/S0040364415020155
Abstract: A model of the thermal process in high-frequency capacitive discharge plasma of low pressure in air is considered. The influence of the discharge power and pressure on the temperature distribution in the discharge gap (including the case where a polymer film sample is placed in it) is analyzed. The results of numerical calculations are compared with the data of direct measurements of the gas temperature in the discharge and the film temperature. An example of the practical use of the technique for calculating the temperature field in a discharge during plasma modification of a polymer surface is shown.
Received: 13.02.2014
Accepted: 05.11.2014
English version:
High Temperature, 2015, Volume 53, Issue 2, Pages 167–170
DOI: https://doi.org/10.1134/S0018151X15020157
Bibliographic databases:
Document Type: Article
UDC: 537.532.74
Language: Russian
Citation: A. V. Markov, Yu. P. Yulenets, “Heating of gas and polimeric material in low-temperature plasma of a high-frequency discharge”, TVT, 53:2 (2015), 169–173; High Temperature, 53:2 (2015), 167–170
Citation in format AMSBIB
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    • This publication is cited in the following 4 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    		Teplofizika vysokikh temperatur Teplofizika vysokikh temperatur
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