Abstract:
A method of gas-phase deposition of diamond structures with the use of a high-velocity jets for transporting gases activated in a microwave plasma to the substrate is developed. The diamond structures are synthesized from a hydrogen-methane mixture with the methane concentration of 1%. The influence of the gas mixture flow rate on the synthesis of the diamond structures with an unchanged composition of the mixture, pressure in the deposition chamber, and substrate temperature is studied. It is found that an increase in the flow rate leads to an increase in the polycrystalline film density and in the size of the diamond crystals forming the film. The composition of the mixture at the discharge chamber exit is numerically analyzed for different flow rates of the gas mixture. A correlation of the mixture composition with the growth rate and quality of the diamond structures is demonstrated.
Citation:
A. K. Rebrov, A. A. Emel'yanov, M. Yu. Plotnikov, N. I. Timoshenko, V. V. Terekhov, I. B. Yudin, “Effect of the gas mixture flow rate on the process of diamond synthesis from a high-velocity microwave plasma”, Prikl. Mekh. Tekh. Fiz., 61:5 (2020), 158–167; J. Appl. Mech. Tech. Phys., 61:5 (2020), 819–827
\Bibitem{RebEmePlo20}
\by A.~K.~Rebrov, A.~A.~Emel'yanov, M.~Yu.~Plotnikov, N.~I.~Timoshenko, V.~V.~Terekhov, I.~B.~Yudin
\paper Effect of the gas mixture flow rate on the process of diamond synthesis from a high-velocity microwave plasma
\jour Prikl. Mekh. Tekh. Fiz.
\yr 2020
\vol 61
\issue 5
\pages 158--167
\mathnet{http://mi.mathnet.ru/pmtf280}
\crossref{https://doi.org/10.15372/PMTF20200517}
\elib{https://elibrary.ru/item.asp?id=44093192}
\transl
\jour J. Appl. Mech. Tech. Phys.
\yr 2020
\vol 61
\issue 5
\pages 819--827
\crossref{https://doi.org/10.1134/S002189442005017X}
Linking options:
https://www.mathnet.ru/eng/pmtf280
https://www.mathnet.ru/eng/pmtf/v61/i5/p158
This publication is cited in the following 8 articles:
Aleksey Alekseevich Emelyanov, M. Yu. Plotnikov, Nikolay I. Timoshenko, Ivan B. Yudin, “GAS-JET MPCVD SYNTHESIS OF DIAMOND COATINGS AT DIFFERENT PRESSURES IN THE DEPOSITION CHAMBER”, Interfac Phenom Heat Transfer, 13:1 (2025), 45
I. B. Yudin, M. Yu. Plotnikov, A. K. Rebrov, 2ND INTERNATIONAL CONFERENCE ON ADVANCED EARTH SCIENCE AND FOUNDATION ENGINEERING (ICASF 2023): Advanced Earth Science and Foundation Engineering, 3050, 2ND INTERNATIONAL CONFERENCE ON ADVANCED EARTH SCIENCE AND FOUNDATION ENGINEERING (ICASF 2023): Advanced Earth Science and Foundation Engineering, 2024, 080006
A. A. Emel'yanov, M. Yu. Plotnikov, N. I. Timoshenko, I. B. Yudin, “Gas-jet synthesis of diamond coatings on silicon substrates from an H2 + CH4 + Ar mixture activated in a microwave discharge”, J. Appl. Mech. Tech. Phys., 64:5 (2024), 748–756
A. A. Emelyanov, V. A. Pinaev, M. Yu. Plotnikov, A. K. Rebrov, N. I. Timoshenko, I. B. Yudin, “Effect of argon on microwave plasma chemical vapor deposition of diamond coatings from an H2+CH4+Ar mixture activated in a microwave discharge”, Thermophys. Aeromech., 30:3 (2023), 393
A. A. Emel'yanov, V. A. Pinaev, M. Yu. Plotnikov, A. K. Rebrov, N. I. Timoshenko, I. B. Yudin, “Optical and gas-dynamic measurements in a microwave discharge plasma flow under conditions of gas-jet synthesis of diamond”, J. Appl. Mech. Tech. Phys., 63:3 (2022), 418–424
A A Emelyanov, V A Pinaev, M Yu Plotnikov, A K Rebrov, N I Timoshenko, I B Yudin, “Effect of methane flow rate on gas-jet MPCVD diamond synthesis”, J. Phys. D: Appl. Phys., 55:20 (2022), 205202
A A Emelyanov, M Yu Plotnikov, N I Timoshenko, I B Yudin, “Effective cooling of substrates with low thermal conductivity under conditions of gas-jet MPCVD diamond synthesis”, J. Phys.: Conf. Ser., 2119:1 (2021), 012119
Suresh Gosavi, Rena Tabei, Nitish Roy, Sanjay S. Latthe, Yuvaraj M. Hunge, Norihiro Suzuki, Takeshi Kondo, Makoto Yuasa, Katsuya Teshima, Akira Fujishima, Chiaki Terashima, “Low Temperature Deposition of TiO2 Thin Films through Atmospheric Pressure Plasma Jet Processing”, Catalysts, 11:1 (2021), 91
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