Abstract:
The effect of pulsed laser annealing on the formation of ohmic Mo/Ti contacts to diamond is studied. Using the method of secondary-ion mass spectrometry, it was shown that laser annealing of the contacts leads to effective diffusion of carbon atoms into the titanium layer and the formation of titanium carbide in the transition region with a diamond with a thickness of 15–20 nm. Rapid thermal annealing of the same contact system is accompanied by a sharp increase in the oxygen content in the titanium layer and in the transition layer with diamond and the formation of titanium oxide. In this case, the titanium carbide phase is not formed in the Ti-C transition layer. It was also shown that, in the used laser annealing mode, graphitization of the contact layer of diamond does not occur, which could drastically reduce the mechanical strength and adhesion of the contacts.
The work was supported by the Russian Foundation for Basic Research (project no. 18-02-00565) in the part of the development of the secondary ion mass spectrometry analysis technique for carbon-containing materials and the Russian Scientific Foundation (no.17-19-01580) in the part of the production of doped epitaxial diamond films and the development of technological methods for forming ohmic contacts for diamond electronics problems.
Citation:
M. N. Drozdov, E. A. Arkhipova, Yu. N. Drozdov, S. A. Kraev, V. I. Shashkin, A. E. Parafin, M. A. Lobaev, A. L. Vikharev, A. M. Gorbachev, D. B. Radishev, V. A. Isaev, S. A. Bogdanov, “The use of pulsed laser annealing to form ohmic Mo/Ti contacts to diamond”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 46:11 (2020), 34–38; Tech. Phys. Lett., 46:6 (2020), 551–555
\Bibitem{DroArkDro20}
\by M.~N.~Drozdov, E.~A.~Arkhipova, Yu.~N.~Drozdov, S.~A.~Kraev, V.~I.~Shashkin, A.~E.~Parafin, M.~A.~Lobaev, A.~L.~Vikharev, A.~M.~Gorbachev, D.~B.~Radishev, V.~A.~Isaev, S.~A.~Bogdanov
\paper The use of pulsed laser annealing to form ohmic Mo/Ti contacts to diamond
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2020
\vol 46
\issue 11
\pages 34--38
\mathnet{http://mi.mathnet.ru/pjtf5090}
\crossref{https://doi.org/10.21883/PJTF.2020.11.49497.18261}
\elib{https://elibrary.ru/item.asp?id=43800718}
\transl
\jour Tech. Phys. Lett.
\yr 2020
\vol 46
\issue 6
\pages 551--555
\crossref{https://doi.org/10.1134/S1063785020060024}
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https://www.mathnet.ru/eng/pjtf/v46/i11/p34
This publication is cited in the following 2 articles:
Ayesha Sharif, Nazar Farid, Mingqing Wang, Rajani K Vijayaraghavan, Kwang-Leong Choy, Patrick J McNally, Gerard M O'Connor, “Non-melt selective enhancement of crystalline structure in molybdenum thin films using femtosecond laser pulses”, J. Phys. D: Appl. Phys., 55:11 (2022), 115301
M.N. Drozdov, A.E. Ieshkin, O.A. Streletskiy, O. Yu Nishchak, S.F. Belykh, A. Tolstoguzov, “TOF-SIMS for carbon hybridization state analysis”, Carbon, 186 (2022), 83
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