Abstract:
The fabrication process of ohmic contacts to a diamond-like carbon (DLC) layer is described with the sequential deposition of a Au/Mo/Ti metallic layer onto it. The contacts have good mechanical and adhesion properties. Their specific contact resistance is varied from 1.4 × 10−4 to 6.4 × 10−5Ω cm2 depending on the DLC layer thickness. The temperature dependence of the layer film resistance is investigated. It is shown that thin DLC layers provide better characteristics of an ohmic contact due to their more uniform graphitization during thermal annealing.
In this work, we used equipment of the Joint Use Common Research Center “Physics and Technology of Micro- and Nanostructures”. Deposition and investigation of the DLC layers is supported by the Presidential Grant of the Russian Federation for Young Candidates of Science no. MK-3450.2019.2.
In the part of the development of the SIMS procedure, this study was supported by the Russian Foundation for Basic Research, project no. 18-02-00565.
Citation:
A. I. Okhapkin, P. A. Yunin, E. A. Arkhipova, S. A. Kraev, S. A. Korolev, M. N. Drozdov, V. I. Shashkin, “Formation of ohmic contacts to a diamond-like carbon layer deposited on a dielectric diamond substrate”, Fizika i Tekhnika Poluprovodnikov, 54:9 (2020), 865–867; Semiconductors, 54:9 (2020), 1056–1058
\Bibitem{OkhYunArk20}
\by A.~I.~Okhapkin, P.~A.~Yunin, E.~A.~Arkhipova, S.~A.~Kraev, S.~A.~Korolev, M.~N.~Drozdov, V.~I.~Shashkin
\paper Formation of ohmic contacts to a diamond-like carbon layer deposited on a dielectric diamond substrate
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2020
\vol 54
\issue 9
\pages 865--867
\mathnet{http://mi.mathnet.ru/phts5161}
\crossref{https://doi.org/10.21883/FTP.2020.09.49822.14}
\elib{https://elibrary.ru/item.asp?id=44154189}
\transl
\jour Semiconductors
\yr 2020
\vol 54
\issue 9
\pages 1056--1058
\crossref{https://doi.org/10.1134/S1063782620090213}
Linking options:
https://www.mathnet.ru/eng/phts5161
https://www.mathnet.ru/eng/phts/v54/i9/p865
This publication is cited in the following 2 articles:
Lian-Xi 恋希 Mu 牟, Shang-Man 上熳 Zhao 赵, Peng 鹏 Wang 王, Xiao-Lu 晓芦 Yuan 原, Jin-Long 金龙 Liu 刘, Zhi-Fu 志甫 Zhu 朱, Liang-Xian 良贤 Chen 陈, Jun-Jun 俊俊 Wei 魏, Xiao-Ping 阳晓平 Ou-Yang 欧, Cheng-Ming 成明 Li 李, “Effect of surface modification on the radiation stability of diamond ohmic contacts”, Chinese Phys. B, 33:2 (2024), 026801
Andrey Okhapkin, Mikhail Drozdov, Pavel Yunin, Stanislav Kraev, Sergey Korolyov, Dmitry Radishev, “Multilayer Diamond‐Like Carbon Films on Monocrystalline Diamond”, Physica Status Solidi (a), 2024
Citation in format AMSBIB
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