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Pis'ma v Zhurnal Èksperimental'noi i Teoreticheskoi Fiziki, 2022, Volume 116, Issue 10, Pages 694–701
DOI: https://doi.org/10.31857/S1234567822220086 (Mi jetpl6804) 		 
CONDENSED MATTER

Influence of crystallization on the 3D structure of pores in ferroelectric PZT films

A. V. Atanovaa, D. N. Khmelenina, O. M. Zhigalinaba

a Shubnikov Institute of Crystallography, Federal Scientific Research Centre Crystallography and Photonics, Russian Academy of Sciences, Moscow, 119333 Russia
b Bauman Moscow State Technical University, Moscow, 107005 Russia
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DOI: https://doi.org/10.31857/S1234567822220086
Abstract: The structure of porous lead titanate-zirconate films, obtained by chemical deposition from solutions containing Brij 76, has been visualized for the first time using focused ion beam scanning electron microscopy nanotomography. Several techniques for determining the connectivity of pores and their distribution are presented. It is shown that the films have a highly connected system of pores regularly distributed in sublayers; this system is formed during multilayer deposition and subsequent crystallization.
Funding agency Grant number
Ministry of Science and Higher Education of the Russian Federation
Russian Foundation for Basic Research 20-32-90056
This study was supported by the Ministry of Science and Higher Education of the Russian Federation (state assignment for the Federal Scientific Research Centre “Crystallography and Photonics” of the Russian Academy of Sciences) in the part of sample preparation and TEM studies and by the Russian Foundation for Basic Research (project no. 20-32-90056) in the part of FIB-SEM nanotomography studies.
Received: 27.09.2022
Revised: 07.10.2022
Accepted: 07.10.2022
English version:
Journal of Experimental and Theoretical Physics Letters, 2022, Volume 116, Issue 10, Pages 716–722
DOI: https://doi.org/10.1134/S0021364022602056
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. V. Atanova, D. N. Khmelenin, O. M. Zhigalina, “Influence of crystallization on the 3D structure of pores in ferroelectric PZT films”, Pis'ma v Zh. Èksper. Teoret. Fiz., 116:10 (2022), 694–701; JETP Letters, 116:10 (2022), 716–722
Citation in format AMSBIB
\Bibitem{AtaKhmZhi22}
\by A.~V.~Atanova, D.~N.~Khmelenin, O.~M.~Zhigalina
\paper Influence of crystallization on the 3D structure of pores in ferroelectric PZT films
\jour Pis'ma v Zh. \`Eksper. Teoret. Fiz.
\yr 2022
\vol 116
\issue 10
\pages 694--701
\mathnet{http://mi.mathnet.ru/jetpl6804}
\crossref{https://doi.org/10.31857/S1234567822220086}
\edn{https://elibrary.ru/lyumea}
\transl
\jour JETP Letters
\yr 2022
\vol 116
\issue 10
\pages 716--722
\crossref{https://doi.org/10.1134/S0021364022602056}
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